Fundamentals Of Microfabrication - Madou Marc

Descripción

LIBRERÍA LEA+

MEMS technology and applications have grown at a tremendous pace, while structural dimensions have grown smaller and smaller, reaching down even to the molecular level. With this movement have come new types of applications and rapid advances in the technologies and techniques needed to fabricate the increasingly miniature devices that are literally changing our world.

Fundamentals of Microfabrication, Second Edition offers unique, in-depth coverage of the science of miniaturization, its methods, and materials. From the fundamentals of lithography through bonding and packaging to quantum structures and molecular engineering, it provides the background, tools, and directions you need to confidently choose fabrication methods and materials for a particular miniaturization problem.

A best seller in its first edition, this revision reflects the many developmens in methods, materials, and applications that have recently emerged. Its many refinements include:
- Updated and enhanced dismussions of topics including DNA arrays, microfluidics, micromolding techniques, and nanotechnology
- In-depth coverage of bio-MEMS, high-temperature MEMS, and optical MEMS.
- Many more links to relevant Web sites
- Problem sets within each chapter

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